• General: free of processing agents, particles and free of stains (according Bright and UV light inspection)
  • Particular requirements in the μ and nano range
  • Extreme limit values in relation to residual organics or residual moisture
  • Atomic/molecular limits in the atomic % range or significantly below
     

High Purity Cleaning Brochure     

High Purity Test Center Brochure

Movie: High Purity Test Center     

Movie: High Purity Processes       

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