Components for EUV and DUV lithography
Wafer Scanner
Depositing systems
High-vacuum pumps and valves
Components for high-power lasers (High-Power Ultra-Short-Wavelength)
Components for scientific measurement and analysis systems, e.g. gas chromatographs, electron scanning microscopes, mass spectrometers
Optical substrates like lenses, prisms, wafers, filters, masks,..

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